Browsing by Subject "Lithography"

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Design, Synthesis, and Characterization of Metal Oxide Nanostructures Formed Through Natural and Direct-Write Processes

Sharps, Meredith (University of Oregon, 2019-09-18)

Inorganic metal oxide nanomaterials are of interest because they exhibit unique properties that can aid in applications including catalysis, energy storage, sensing, and medicine. These properties arise from nanoscale ...
Development and Applications of Thin Film Resists for Electron Beam Lithography

Fairley, Kurtis (University of Oregon, 2016-02-23)

Throughout this work several thin film resists have been studied with substantial focus on HafSOx and SU-8. The study of HafSOx has granted more insight into how inorganic, spin coated films form and react under the electron ...