Scholars' Bank will be on a content freeze from 9/6 - 9/16 as we transition to a new & improved version. Minimal downtime expected on 9/16. Stay tuned for more updates!

Browsing Theses & Dissertations by Author "Fairley, Kurtis"

Navigation

Display Options

Results

Now showing items 1-1 of 1

Development and Applications of Thin Film Resists for Electron Beam Lithography

Fairley, Kurtis (University of Oregon, 2016-02-23)

Throughout this work several thin film resists have been studied with substantial focus on HafSOx and SU-8. The study of HafSOx has granted more insight into how inorganic, spin coated films form and react under the electron ...